Study on structure and electrical properties of High-k Ta2O5 gate dielectric

Study on structure and electrical properties of High-k Ta2O5 gate dielectric

CHEN Xilin;YU Tao;WU Xuemei

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (07) : 1335-1338.

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Study on structure and electrical properties of High-k Ta2O5 gate dielectric

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