Effect of annealing on the properties of Boron doped μc-Si by RF-PECVD

Effect of annealing on the properties of Boron doped μc-Si by RF-PECVD

Guo Wang ;LI Xin-Li;;;

Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (06) : 44-0.

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Effect of annealing on the properties of Boron doped μc-Si by RF-PECVD

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