Structure and IR optical property of nitrogen-rich MeNx（Me=Ti、Zr、Hf）films

Structure and IR optical property of nitrogen-rich MeNx（Me=Ti、Zr、Hf）films

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Journal of Functional Materials ›› 2011, Vol. 42 ›› Issue (05) : 1-0.

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Structure and IR optical property of nitrogen-rich MeNx（Me=Ti、Zr、Hf）films

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