Effect of sputtering current on the structure and properties of CrNx films deposited by magnetron sputtering

Effect of sputtering current on the structure and properties of CrNx films deposited by magnetron sputtering

Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (12) : 44-0.

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Effect of sputtering current on the structure and properties of CrNx films deposited by magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2010, 41(12): 44-0

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