The study on technology for high corrosion-resistant SiNx thin film deposited by plasma enhanced chemical vapor deposition

The study on technology for high corrosion-resistant SiNx thin film deposited by plasma enhanced chemical vapor deposition

Liu Rui Wen;Jiao Bin bin ;

Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (11) : 11-0.

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The study on technology for high corrosion-resistant SiNx thin film deposited by plasma enhanced chemical vapor deposition

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