Investigation of GaN-based Multilayer Structure Films on Sapphire Substrate by Spectroscopic Ellipsometry

Investigation of GaN-based Multilayer Structure Films on Sapphire Substrate by Spectroscopic Ellipsometry

DU Jiang-Feng

Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (05) : 15-0.

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Investigation of GaN-based Multilayer Structure Films on Sapphire Substrate by Spectroscopic Ellipsometry

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