Effect of Ta2O5 content in target and annealing temperature on morphological properties of Ta-ZnO films

Effect of Ta2O5 content in target and annealing temperature on morphological properties of Ta-ZnO films

CHEN Jinjun;CAO Ling;SONG Xueping

Journal of Functional Materials ›› 2010, Vol. 41 ›› Issue (04) : 687-689.

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Effect of Ta2O5 content in target and annealing temperature on morphological properties of Ta-ZnO films

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