Effect of graphene coating and surface texture on friction properties of single crystal silicon

doi:10.3969/j.issn.1001-9731.2024.05.031

Journal of Functional Materials ›› 2024, Vol. 55 ›› Issue (5) : 5222-5231. DOI: 10.3969/j.issn.1001-9731.2024.05.031

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Effect of graphene coating and surface texture on friction properties of single crystal silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2024, 55(5): 5222-5231 https://doi.org/10.3969/j.issn.1001-9731.2024.05.031

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Received	Revised	Published
2024-01-16	2024-03-22	2024-05-30
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2024-06-11

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