Preparation of MoO<sub>3</sub> high-transmittance hydrophilic optical films by inductively coupled plasma-enhanced magnetron sputtering

doi:10.3969/j.issn.1001-9731.2023.11.014

Preparation of MoO₃ high-transmittance hydrophilic optical films by inductively coupled plasma-enhanced magnetron sputtering

PENG Jingquan, ZHENG Xuejun, FENG Chunyang, LI Fang, HUANG Le, CHEN Li, ZUO Binhuai, CHEN Lijuan, HE Chucai

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Journal of Functional Materials ›› 2023, Vol. 54 ›› Issue (11) : 11118-11125. DOI: 10.3969/j.issn.1001-9731.2023.11.014

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Preparation of MoO₃ high-transmittance hydrophilic optical films by inductively coupled plasma-enhanced magnetron sputtering

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2022-12-16	2023-01-13
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2023-12-08

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