Study on the photoelectric performance enhancement mechanism of Ti-Al co-doped Si films

doi:10.3969/j.issn.1001-9731.2023.10.004

Jorunal of Functional Materials ›› 2023, Vol. 54 ›› Issue (10) : 10021-10029. DOI: 10.3969/j.issn.1001-9731.2023.10.004

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Study on the photoelectric performance enhancement mechanism of Ti-Al co-doped Si films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2023, 54(10): 10021-10029 https://doi.org/10.3969/j.issn.1001-9731.2023.10.004

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Received	Revised	Published
2023-05-03	2023-07-06	2023-10-30
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2023-11-08

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