Preparation of patterned In<sub>2</sub>O<sub>3</sub>: Sn films and the effect of developer on the patterns

doi:10.3969/j.issn.1001-9731.2021.03.013

Jorunal of Functional Materials ›› 2021, Vol. 52 ›› Issue (3) : 3092-3097. DOI: 10.3969/j.issn.1001-9731.2021.03.013

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Preparation of patterned In₂O₃: Sn films and the effect of developer on the patterns

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2021, 52(3): 3092-3097 https://doi.org/10.3969/j.issn.1001-9731.2021.03.013

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Received	Revised	Published
2020-07-27	2020-09-29	2021-03-30
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2021-03-30

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