Infrared optical and mechanical properties of boron carbidethin films deposited by hydrogen-assisted pulsed DC sputtering

doi:10.3969/j.issn.1001-9731.2020.07.007

Journal of Functional Materials ›› 2020, Vol. 51 ›› Issue (7) : 7039-7044. DOI: 10.3969/j.issn.1001-9731.2020.07.007

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2020, 51(7): 7039-7044 https://doi.org/10.3969/j.issn.1001-9731.2020.07.007

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2020-01-09	2020-07-30
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2020-07-30

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