Preparation of Al<sub>2</sub>O<sub>3</sub> thin films by magnetron sputtering and its corrosion resistance

doi:10.3969/j.issn.1001-9731.2020.02.035

Journal of Functional Materials ›› 2020, Vol. 51 ›› Issue (2) : 2209-2213. DOI: 10.3969/j.issn.1001-9731.2020.02.035

Process & Technology

Preparation of Al₂O₃ thin films by magnetron sputtering and its corrosion resistance

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2020, 51(2): 2209-2213 https://doi.org/10.3969/j.issn.1001-9731.2020.02.035

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2019-09-25	2020-02-29
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2020-02-29

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