Study on growth action of microcrystalline silicon thin films at different deposition rates

doi:10.3969/j.issn.1001-9731.2019.02.003

Journal of Functional Materials ›› 2019, Vol. 50 ›› Issue (2) : 2012-2016. DOI: 10.3969/j.issn.1001-9731.2019.02.003

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Study on growth action of microcrystalline silicon thin films at different deposition rates

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2019, 50(2): 2012-2016 https://doi.org/10.3969/j.issn.1001-9731.2019.02.003

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2018-07-21	2019-02-28
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2019-02-28

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