Fabrication of amorphous carbon films on Si substrate via liquid phase deposition method

doi:10.3969/j.issn.1001-9731.2019.01.027

Journal of Functional Materials ›› 2019, Vol. 50 ›› Issue (1) : 1174-1177. DOI: 10.3969/j.issn.1001-9731.2019.01.027

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Fabrication of amorphous carbon films on Si substrate via liquid phase deposition method

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2019, 50(1): 1174-1177 https://doi.org/10.3969/j.issn.1001-9731.2019.01.027

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2018-08-31	2019-01-31
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2019-01-31

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