Preparation and characterization of a novel SOI insulating silicon composite

HUANG Zhiqiang, SHEN Yanyu, GU Yujie, MA Xuetao

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Jorunal of Functional Materials ›› 2019, Vol. 50 ›› Issue (1) : 1001-1005. DOI: 10.3969/j.issn.1001-9731.2019.01.001
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Preparation and characterization of a novel SOI insulating silicon composite

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