Effect of magnetron sputtering on the growth and field-induced phase transition of vanadium dioxide thin films

HE Chang’an, WANG Qingguo, QU Zhaoming, LU Pin, WANG Yan

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Jorunal of Functional Materials ›› 2018, Vol. 49 ›› Issue (12) : 12179-12183. DOI: 10.3969/j.issn.1001-9731.2018.12.029
Process & Technology

Effect of magnetron sputtering on the growth and field-induced phase transition of vanadium dioxide thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2018, 49(12): 12179-12183 https://doi.org/10.3969/j.issn.1001-9731.2018.12.029

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