Comparative study on structure and optical properties of TiO<sub>2</sub> films by DC magnetron sputtering and energy filtering magnetron sputtering

doi:10.3969/j.issn.1001-9731.2018.07.014

Jorunal of Functional Materials ›› 2018, Vol. 49 ›› Issue (7) : 7088-7092. DOI: 10.3969/j.issn.1001-9731.2018.07.014

Comparative study on structure and optical properties of TiO₂ films by DC magnetron sputtering and energy filtering magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2018, 49(7): 7088-7092 https://doi.org/10.3969/j.issn.1001-9731.2018.07.014

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2017-12-02	2018-07-30
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2018-07-30

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