Effects of yttrium content and thickness on the phase evolution of HfO<sub>2</sub> thin films

doi:10.3969/j.issn.1001-9731.2017.10.026

Jorunal of Functional Materials ›› 2017, Vol. 48 ›› Issue (10) : 10154-10158. DOI: 10.3969/j.issn.1001-9731.2017.10.026

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Effects of yttrium content and thickness on the phase evolution of HfO₂ thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(10): 10154-10158 https://doi.org/10.3969/j.issn.1001-9731.2017.10.026

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2017-03-22	2017-10-31
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2017-10-31

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