Effects of yttrium content and thickness on the phase evolution of HfO<sub>2</sub> thin films

doi:10.3969/j.issn.1001-9731.2017.10.026

Journal of Functional Materials ›› 2017, Vol. 48 ›› Issue (10) : 10154-10158. DOI: 10.3969/j.issn.1001-9731.2017.10.026

Research & Development

Effects of yttrium content and thickness on the phase evolution of HfO₂ thin films

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(10): 10154-10158 https://doi.org/10.3969/j.issn.1001-9731.2017.10.026

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(1481 KB)

Accesses

Citation

Detail

Sections

Recommended

Received	Published
2017-03-22	2017-10-31
Issue Date
2017-10-31

Please choose a citation manager

Content to export

HeighLight

Abstract

Key words

Cite this article

{{custom_sec.title}}

{{custom_sec.title}}

References

References

{{custom_fnGroup.title_en}}

Footnotes

{{custom_ack.title_en}}

Funding

RIGHTS & PERMISSIONS