Preparation of high-density tantalum carbide coating by high-temperature chemical vapor deposition

doi:10.3969/j.issn.1001-9731.2017.06.033

Journal of Functional Materials ›› 2017, Vol. 48 ›› Issue (6) : 6183-6186. DOI: 10.3969/j.issn.1001-9731.2017.06.033

Process & Technology

Preparation of high-density tantalum carbide coating by high-temperature chemical vapor deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(6): 6183-6186 https://doi.org/10.3969/j.issn.1001-9731.2017.06.033

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2016-06-10	2017-06-28
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2017-06-28

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