Investigation on monocrystalline silicon quickly phosphorus diffusion

doi:10.3969/j.issn.1001-9731.2017.02.016

Journal of Functional Materials ›› 2017, Vol. 48 ›› Issue (2) : 2091-2095. DOI: 10.3969/j.issn.1001-9731.2017.02.016

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Investigation on monocrystalline silicon quickly phosphorus diffusion

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 48(2): 2091-2095 https://doi.org/10.3969/j.issn.1001-9731.2017.02.016

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2016-05-09	2017-02-28
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2017-02-28

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