Preparation and properties of polycrystalline silicon thick film on graphite substrate

YANG Bo, CHEN Nuofu, KONG Fandi, MU Xiaoye, TAO Quanli, BAI Yiming, CHEN Jikun

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Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (4) : 70-73. DOI: 10.3969/j.issn.1001-9731.2016.04.014
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Preparation and properties of polycrystalline silicon thick film on graphite substrate

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