Preparation of polysilicon from SiO<sub>2</sub> by the solid oxide oxygen ion-conducting membrane (SOM) method

doi:10.3969/j.issn.1001-9731.2016.02.035

Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (2) : 2177-2182. DOI: 10.3969/j.issn.1001-9731.2016.02.035

Process & Technology

Preparation of polysilicon from SiO₂ by the solid oxide oxygen ion-conducting membrane (SOM) method

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(2): 2177-2182 https://doi.org/10.3969/j.issn.1001-9731.2016.02.035

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2015-02-21	2016-02-28
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2016-02-28

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