The adsorption and diffusion of single atoms around island in Nb-Si-N coating deposit process: a first principles calculation

REN Yuan, LIU Xuejie, LI Zhi

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Journal of Functional Materials ›› 2016, Vol. 47 ›› Issue (1) : 1136-1139. DOI: 10.3969/j.issn.1001-9731.2016.01.028
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The adsorption and diffusion of single atoms around island in Nb-Si-N coating deposit process: a first principles calculation

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 47(1): 1136-1139 https://doi.org/10.3969/j.issn.1001-9731.2016.01.028

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