Si衬底上低真空热处理制备单一相Mg2Si半导体薄膜

肖清泉;谢泉;沈向前;张晋敏;陈茜

Preparation of single phase semiconducting Mg2Si film on Si substrate by low vacuum heat treatment

XIAO Qing-quan;XIE Quan;SHEN Xiang-qian;ZHANG Jin-min;CHEN Qian

. 2013, (04): 585 -589 .