Si衬底上低真空热处理制备单一相Mg2Si半导体薄膜
肖清泉;谢泉;沈向前;张晋敏;陈茜
Si衬底上低真空热处理制备单一相Mg2Si半导体薄膜
Preparation of single phase semiconducting Mg2Si film on Si substrate by low vacuum heat treatment
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