退火对硼掺杂微晶硅薄膜性能的影响

王果;卢景霄;李新利;高海波;焦岳超;李瑞

Effect of annealing on the properties of Boron doped μc-Si by RF-PECVD

Guo Wang ;LI Xin-Li;;;

. 2011, (06): 44 -0 .