CCP/ICP混合放电C4F8/Ar等离子体高、低频功率对AZO薄膜绒面效果的影响
吴明智;金成刚;王飞;黄天源;吴雪梅;诸葛兰剑
Effect of high-frequency and low-frequency power of ICP/CCP C4F8/Ar plasma on the textured structure of AZO films
WU Ming-zhi;JIN Cheng-gang;WANG Fei;HUANG Tian-yuan;WU Xue-mei;ZHUGE Lan-jian
.
2013, (05): 744
-747
.
