铟锡氢氧化物的煅烧温度对ITO靶材结构性能的影响
张倍维, 陆映东, 黄作, 莫斌, 方志杰, 黄誓成
Effect of calcination temperature of indium tin hydroxide on structure and properties of ITO target
ZHANG Beiwei, LU Yingdon, HUANG Zuo, MO Bin, FANG Zhijie, HUANG Shicheng
功能材料
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2025, (1): 1209
-1216
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DOI: 10.3969/j.issn.1001-9731.2025.01.027
