铌酸锂单晶薄膜化学机械抛光及极化研究
乔骁骏, 薛刚, 丑修建
Researchon LiNbO3 single crystal thin films prepared using chemical mechanical polishing and its polarization
QIAO Xiaojun, XUE Gang, CHOU Xiujian
功能材料
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2024, (9): 9222
-9228
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DOI: 10.3969/j.issn.1001-9731.2024.09.028
