磁控溅射制备大面积原子级平滑超低电阻率TiN薄膜电极
田忠杰, 史淑艳, 陈琦磊, 芮祥新, 黄新宇, 孙纳纳, 周大雨
Preparation of largescale smooth TiN thin film electrode with ultra low resistivity by magnetron sputtering
TIAN Zhongjie, SHI Shuyan, CHEN Qilei, RUI Xiangxin, HUANG Xinyu, SUN Nana, ZHOU Dayu
功能材料
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2021, (7): 7012
-7017
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DOI: 10.3969/j.issn.1001-9731.2021.07.003
