图案化In2O3:Sn薄膜制备及显影剂对图案制备的影响研究
任洋, 贺海燕, 赵高扬, 王允威
Preparation of patterned In2O3: Sn films and the effect of developer on the patterns
REN Yang, HE Haiyan, ZHAO Gaoyang, WANG Yunwei
功能材料
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2021, (3): 3092
-3097
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DOI: 10.3969/j.issn.1001-9731.2021.03.013
