氢辅助脉冲直流溅射沉积的碳化硼薄膜的红外光学性质与机械性质的研究
陈儒婷, SHIGENG SONG, DES GIBSON, LEWIS FLEMING, SAM AHMADZADEH, HIN ON CHU, XIAOLING ZHANG
Infrared optical and mechanical properties of boron carbidethin films deposited by hydrogen-assisted pulsed DC sputtering
CHEN Ruting, SONG Shigeng, GIBSON Des, FLEMING Lewis, AHMADZADEH Sam, CHU Hinon, ZHANG Xiaoling
功能材料
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2020, (7): 7039
-7044
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DOI: 10.3969/j.issn.1001-9731.2020.07.007
