以氢化钛为钛源制备高纯Ti2AlN粉体及刻蚀行为
郭奕彤, 王军凯, 胡前库, 王李波, 周爱国
Preparation and etching behavior of highly pure Ti2AlNpowders from TiH2 as Ti source
GUO Yitong, WANG Junkai, HU Qianku, WANG Libo, ZHOU Aiguo
功能材料
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2020, (5): 5103
-5110
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DOI: 10.3969/j.issn.1001-9731.2020.05.017
