磁控溅射制备Al2O3薄膜及耐蚀性能研究
吴坤尧, 刘强, 鲁媛媛, 孙乐
Preparation of Al2O3 thin films by magnetron sputtering and its corrosion resistance
WU Kunyao, LIU Qiang, LU Yuanyuan, SUN Le
功能材料 . 2020, (2): 2209 -2213 .  DOI: 10.3969/j.issn.1001-9731.2020.02.035