衬底温度对直流反应磁控溅射TiN电极薄膜显微结构及导电性能的影响
周方杨, 徐进, 杨喜锐, 梁海龙, 赵鹏, 周大雨
Effect of substrates temperature on microstructure and conductivity of TiN electrode thin film prepared by DC reactive magnetron sputtering
ZHOU Fangyang, XU Jin, YANG Xirui, LIANG Hailong, ZHAO Peng, ZHOU Dayu
功能材料
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2017, (8): 8203
-8207
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DOI: 10.3969/j.issn.1001-9731.2017.08.036
