磁控溅射和能量过滤磁控溅射TiO2薄膜结构和光学性质的对比研究
赵遵杰, 王朝勇, 吴丹, 张世慧, 夏雨, 姚宁
Comparative study on structure and optical properties of TiO2 films by DC magnetron sputtering and energy filtering magnetron sputtering
ZHAO Zunjie, WANG Zhaoyong, WU Dan, ZHANG Shihui, XIA Yu, YAO Ning
功能材料
.
2018, (7): 7088
-7092
.
DOI: 10.3969/j.issn.1001-9731.2018.07.014
