不同氮气气压脉冲激光沉积氮化钛薄膜的结构和电学性能
李玉雄, 隋展鹏, 谷承艳, 陈益钢, 蒋春萍
Structure and electrical properties of titanium nitride thin films prepared by pulsed laser deposition at different pressures
LI Yuxiong, SUI Zhanpeng, GU Chengyan, CHEN Yigang, JIANG Chunping
功能材料
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2018, (6): 6196
-6200
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DOI: 10.3969/j.issn.1001-9731.2018.06.033
