单靶磁控溅射法制备Cu2ZnSnS4薄膜及其异质结光电探测器
林煌丁, 刘相志, 方浩, 周全, 张恩亮, 严鑫, 冷重钱, 张风燕
Preparation and characterization of Cu2ZnSnS4/n-Si heterojunction photodetector by single target magnetron sputtering
LIN Huangding, LIU Xiangzhi, FANG Hao, ZHOU Quan, ZHANG Enliang, YAN Xin, LENG Chongqian, ZHANG Fengyan
功能材料
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2018, (6): 6163
-6167
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DOI: 10.3969/j.issn.1001-9731.2018.06.027
