直流磁控溅射法制备PEN/Ti复合振膜
丁雨田, 陈建军, 高钰璧, 许佳玉, 孟斌, 马元俊
PEN/Ti composite diaphragm prepared by DC magnetron sputtering
DING Yutian, CHEN Jianjun, GAO Yubi, XU Jiayu, MENG Bin, MA Yuanjun
功能材料
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2018, (5): 5169
-5173
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DOI: 10.3969/j.issn.1001-9731.2018.05.029
