快速光热退火制备硅基锗薄膜的机理研究
王从杰, 陈诺夫, 魏立帅, 陶泉丽, 贺凯, 张航, 白一鸣, 陈吉堃
Study on the mechanism of preparation of silicon based germanium thin films by rapid thermal
WANG Congjie, CHEN Nuofu, WEI Lishuai, TAO Quanli, HE Kai, ZHANG Hang, BAI Yiming, CHEN Jikun
功能材料
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2018, (4): 4179
-4183
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DOI: 10.3969/j.issn.1001-9731.2018.04.033
