氩气压对磁控溅射制备CdZnTe薄膜形貌、结构和电学特性的影响
席守智, 介万奇, 王涛, 查钢强, 王奥秋, 于晖, 徐凌燕, 张昊, 杨帆, 周伯儒, 徐亚东, 谷亚旭
Effects of Ar pressure on the morphology, structure and electrical properties of CdZnTe film deposited by magnetron sputtering
XI Shouzhi, JIE Wanqi, WANG Tao, ZHA Gangqiang, WANG Aoqiu, YU Hui, XU Lingyan, ZHANG Hao, YANG Fan, ZHOU Boru, XU Yadong, GU Yaxu
功能材料
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2018, (4): 4128
-4133
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DOI: 10.3969/j.issn.1001-9731.2018.04.023
