直流/射频耦合反应磁控溅射法类金刚石薄膜的制备与分析
刘磊, 王涛, 何智兵, 张玲, 易勇, 杜凯
Investigation of diamond like carbon thin film deposited by coupling DC/RF reactive magnetron sputtering
LIU Lei, WANG Tao, HE Zhibing, ZHANG Ling, YI Yong, DU Kai
功能材料
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2017, (1): 1209
-1214
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DOI: 10.3969/j.issn.1001-9731.2017.01.038
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