直流/射频耦合反应磁控溅射法类金刚石薄膜的制备与分析
刘磊, 王涛, 何智兵, 张玲, 易勇, 杜凯
直流/射频耦合反应磁控溅射法类金刚石薄膜的制备与分析
Investigation of diamond like carbon thin film deposited by coupling DC/RF reactive magnetron sputtering
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