SiC厚膜快速外延生长刻蚀工艺研究

SiC厚膜快速外延生长刻蚀工艺研究

毛开礼, 王英民, 李斌, 赵高扬

Effect of etching process on fast-epitaxial SiC thick films

MAO Kaili, WANG Yingmin, LI Bin, ZHAO Gaoyang

功能材料 . 2017, (1): 1139 -1143 . DOI: 10.3969/j.issn.1001-9731.2017.01.024