Si含量对NbN/CrSiN纳米多层膜微观结构和力学性能的影响
袁庆, 李伟, 刘平, 张柯, 马凤仓, 刘新宽, 陈小红, 何代华
Influence of Si content on microstructure and mechanical property of CrN/TiSiN nano-multilayered films
YUAN Qing, LI Wei, LIU Ping, ZHANG Ke, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua
功能材料
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2018, (1): 1044
-1048
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DOI: 10.3969/j.issn.1001-9731.2018.01.009
