液相法在Si基底上沉积非晶碳膜

罗清威, 焦菲, 邹祥宇, 王玉梅

Fabrication of amorphous carbon films on Si substrate via liquid phase deposition method

LUO Qingwei, JIAO Fei, ZOU Xiangyu, WANG Yumei

功能材料 . 2019, (1): 1174 -1177 . DOI: 10.3969/j.issn.1001-9731.2019.01.027