基底负偏压对CO2气相反应溅射制备C∶TiO2薄膜性能的影响研究
岳天峰, 刘嘉琪, 文峰, 马艳平, 丁春华, 姜宏
Study on the effect of substrate negative bias voltage on the properties of C∶TiO2 thin films prepared by reaction sputtering using CO2 gas
YUE Tianfeng, LIU Jiaqi, WEN Feng, MA Yanping, DING Chunhua, JIANG Hong
功能材料
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2019, (6): 6088
-6094
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DOI: 10.3969/j.issn.1001-9731.2019.06.016
