(AlCrTiZrNb)N/Si3N4纳米多层膜的微观结构和力学性能研究
翟晴晴, 李伟, 刘平, 张柯, 马凤仓, 刘新宽, 陈小红, 何代华
Study on microstructure and mechanical properties of (AlCrTiZrNb)N/Si3N4 nano-multilayer films
ZHAI Qingqing, LI Wei, LIU Ping, ZHANG Ke, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua
功能材料
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2019, (4): 4142
-4147
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DOI: 10.3969/j.issn.1001-9731.2019.04.024
