低损耗掺杂BST薄膜的射频磁控溅射沉积及其阻抗特性研究

陈含笑, 盛苏

Study on RF magnetron sputtering deposition and impedance characterization of doped BST thin films

CHEN Hanxiao, SHENG Su

功能材料 . 2019, (4): 4126 -4129 . DOI: 10.3969/j.issn.1001-9731.2019.04.021